VWSET-E 50-150mm Wafer Vacuum Wand Set

Product Code: VWS-E

A H-Square standard, the VWSET-E vacuum wand set used for handling 150mm and smaller wafers. Set includes everything needed to start handling wafers safely using house vacuum. H-Square recommends house vacuum greater than 22" Hg for best performance. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction, chemical resistant; This is a fixed set; no part substitutions.

Set includes:

T794PKAS ESD PEEK Tip

NOASPF2 Normally Open Vacuum Wand

HSU Vacuum Wand Shut-off Holder

CTA12 Adapter Assembly for grounding coil cord

CC9SDS ESD Coiled Tubing

**Requires external vacuum source

Vacuum tip has a 0.09in2 area vacuum pocket. When used with 22″Hg vacuum source, has a 1lb theoretical holding capacity.

Specification

Wafer Size 150

Dimensions 10" x 10"

Weight 0.5 lb