SSC Series Stainless Steel Thermal Process Cassettes 76-200mm

Industry standard open side wall high temperature 25-slot all-welded stainless steel metal cassettes used in semiconductor manufacturing operations. Transfer and automation compatible. Resist many industrial chemicals and solvents, including sodium and calcium brine, hypochlorite solutions, phosphoric acid, sulfite liquors, and sulfurous acids. Typically used for high thermal processes, polyimide bake, and for ultrasonic cleaning applications. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 550° C

Wafer Size 76, 100, 150, 200mm

Cleanroom capability            ISO Class 3

Thermal environments         Up to 550°C

Finish                 Electropolished Finish

H-Bar          SEMI Standard