AMS Open End Wall Cassettes 76-200mm

Conventional 25-slot aluminium metal cassettes used in semiconductor manufacturing operations. Typically used in areas where wafer positioning is important or where elevated temperatures cause warping to other carriers. Features open end wall, PTFE wafer stops and hard clear (HC) anodization surface finish for abrasion resistance and longevity. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 250° C

Wafer size       76mm - 200mm

Material           Aluminium 6061-T6

H-Bar           Semi Standard SST303

Wafer Stops          Teflon PTFE