MFC Series Process Aluminium Cassettes 150-200mm

A special application all-aluminum metal cassette used in place of a plastic cassette in load-locks, OEM applications and advanced wafer handling applications. Finish coating is electroless nickel (EN) or bare polished aluminum (HV) with vacuum vented screws. A 25 slot cassette. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 350° C"

Wafer Size 150, 200mm

Cleanroom Capability                ISO Class 3

Thermal environments            Up to 330°C

Weight                  8” = 6.5 lbs

Construction              Aluminium 6061-T6