LCT1AS12 Automatic Bulk, Horizontal Wafer Transfer

Tabletop, automatic FOUP to FOSB wafer transfer tool. Wafers are mapped, then gently bulk-lifted in the cassette; minimizing contact with the cassette and eliminating the chances of particulation, abrasion, or wafer edge chipping. Safety sensor detects wafers in the pod. Wafer mapper detects cross slotted, double stack, and double-cross slot wafer position. The sturdy construction assures high reliability, low maintenance, small footprint saves valuable cleanroom space. Antistatic construction; Specify cassette model number(s) with order. Designed for ISO Class 3

The LCTAS12 is compatible with all industry-standard FOUP, FOSB, and SEMI compliant metal and plastic open cassettes.

The LCT1AS12 Features:

Touchscreen control

FOUP to FOSB

Mapping feature checks for cross slot, double stack and wafer presence

PVDF coated rods transfer 25 wafers at a time

Wafer Size 300

Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately

Throughput 60 cassettes per hour

Weight 75 lbs

Cycle time: <30s