AVT Automatic Bulk, Vertical Wafer Transfer Tool

Tabletop, automatic two-cassette vertical bulk-wafer transfer tool. Transfers wafers between various combinations of plastic, metal and quartz cassettes. Cassettes move, rather than wafers, for safer, cleaner transfers. Single-button operation makes the tool user-friendly. The AVT is a high reliability, low maintenance system. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.

Wafer Contact Materials: Antistatic Polypropylene & Acetal, which are high purity materials with good wear resistance, good thermal properties, and outstanding chemical resistance.

The AVT Features:

Transfers 25 wafers at one time.

30 second cycle-time.

Lift comb is made from ESD-safe Acetal material.

Retainer combs are made from Black Acetal.

Wafer Size 76, 100, 150, 200

Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold separately

Throughput 60 cassettes per hour

Weight 40 lbs