WPR Individual Wafer Presenter
Product Code: WPR
Automatic single-wafer presenter designed to present a wafer to an operator for inspection or removal from the cassette and for macro inspection applications. The WPR can be used for wafer flipping (inverting) the wafer 180° degrees for backside applications. Table in-set, or table top. The WPR features a rotating lift blade, allowing full front side and backside wafer inspection. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number with order.
Macro inspection applications
180° wafer fl ipping (inverting) for backside applications
360° wafer rotation for both front and backside applications
The WPR Features:
- A rotating lift blade allowing full front side and backside wafer inspection from one operator position
Wafer Size 76, 100, 150, 200
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold separately
Dimensions 16"W x 14"L x 21"H
Weight 50 lbs
Wafer comb ESD Peek