WS200 Automatic Single Wafer Transfer and Wafer Sorter

Product Code: ws200

A stand-alone tabletop automation system features two-cassette stage configuration. A cost-effective automation tool designed to reduce wafer breakage and scratches. Compatible with industry standard shipping, process, and metal cassettes. Provides a highly flexible control system that any operator can use with minimal training.

The tool is operated from a touch screen display. Operators load the cassettes onto the stage. To move wafers between cassettes, the operator can choose one of the three available modes:

• Manual Mode

• Quick Transfer Mode

• Recipe Mode

A safe vacuum-less low-contact end-effector includes a wafer mapping sensor that maps wafer locations in each cassette and detects wafer presence for accurate movements.

Options:

SECS/GEM Tool Interface

Integrated OCR Automated

Pre-Aligner

Features:

• Single wafer transfer

• Lot split transfer

• Merge applications

• Pitch change applications

• "Fill" loading/removing test wafers from a parent lot

• Scratch reduction by eliminating manual wafer handling

• Combining wafer lots/splitting lots/odd-even