AMC Closed End Wall Cassettes 100mm-200mm

Conventional 25-slot aluminium metal cassettes used in semiconductor manufacturing operations. Features a hard clear (HC) anodization surface finish for abrasion resistance and longevity. 

Typically used in OEM CVD and etch systems where wafer positioning is important or elevated temperatures cause warping to other carriers. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 250° C

Wafer size 100mm, 150mm, 200mm 

Material           Aluminium 6061-T6

H-Bar           Semi Standard SST303

Wafer Stops          Teflon PTFE